This is important for studies of samples with small volumes, especially two-dimensional quantum materials and quantum devices fabricated from these materials 8. Nano-SQUIDs with miniaturized SQUID loops or pickup coils can be placed in close proximity to the sample to enhance the magnetic field sensitivity as well as to perform scanning microscopy 5, 6, 7. Superconducting quantum interference devices (SQUIDs) are some of the most sensitive magnetic detectors 1, 2, 3, 4. This work serves as a proof-of-principle for integration and inductive coupling between superconducting 3D nanostructures and on-chip Josephson nanodevices. The NoS showed improved spatial resolution in both magnetometry and susceptometry relative to the planarized counterpart. We performed scanning imaging with such a needle-on-SQUID (NoS) device on superconducting test patterns with topographic feedback. The nanoneedle coated with a superconducting shell focused the flux from both the field coil and the sample. Here, we use femtosecond laser 3-dimensional (3D) lithography to print a needle onto a nano-SQUID susceptometer to overcome the limits of the planar structure. Due to the functionalities of superconductive integrated circuits, nano-SQUIDs fabricated on chips are particularly versatile, but their spatial resolution has been limited by their planar geometries. A nanofabricated superconducting quantum interference device (nano-SQUID) is a direct and sensitive flux probe used for magnetic imaging of quantum materials and mesoscopic devices.
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